Application of ELID Grinding Technology to Precision and Super-precision Grinding of Hard and Brittle Materials

This paper introduces the basic principle of ELID grinding and analyzes the processing mechanism. The technology of ELID grinding was successfully applied to super-precision mirror surface grinding of such hard and brittle materials as hard metals, engineering caramics and optical glass. The workpieces after grinding can attain the mirror of R_a=0.003~0.018.