Study of Texture for TiN Coating by Ion Plating

The grain direction of TiN coating by hollow calhod discharge ion plating is studied by means of measuring diffraction of auto-polcfiguro and analyzing polefigure.The result shows the e/xistance of texture in TiN coating and the parallel between the (Ⅲ) and the deposited surface.The influence of negative bias on TiN grain's direction is also investigated.The negative bias within the range of 0~200 volt won't change the type and direction of the texture.