Vapor Synthesis of Superhard β-C<sub>3</sub>N<sub>4</sub> Material

Chen Guanghua; Yan Hui; Wang Bo; Song Xuemei; Zhang Xingwang; Lu Yonggang

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Journal of Beijing University of Technology > 1998 > 24(3): 1-4,19.

Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C₃N₄ Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.

Citation:

Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C₃N₄ Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.

Citation:

Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C₃N₄ Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.

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Vapor Synthesis of Superhard β-C₃N₄ Material

1. Department of Materials Science and Engineering, Beijing Polytechnic University, Beijing, 100022;
2. Department of Physics, Lanzhou University, Lanzhou, 730000

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Received Date: March 26, 1998
Available Online: August 08, 2022
Published Date: September 09, 1998

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CN_x adn films including β-C₃N₄ were successfully synthesized, by means of hot-filament assisted reactive sputtering and plasma enhanced hot-filament chemical vapor deposition (CVD) respectively. Here, we report on both the structural characteristics and the surface images of the CN_x thin films. Also, we discuss the correlation between the preparation parameters and the content of β-C₃N₄ phase in the CN_x thin films.
- synthesis of β-C₃N₄,
- reactive sputtering,
- hot-filament CVD

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Vapor Synthesis of Superhard β-C3N4 Material

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Vapor Synthesis of Superhard β-C₃N₄ Material