Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C3N4 Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.
Citation:
Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C3N4 Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.
Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C3N4 Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.
Citation:
Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C3N4 Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.
CNx adn films including β-C3N4 were successfully synthesized, by means of hot-filament assisted reactive sputtering and plasma enhanced hot-filament chemical vapor deposition (CVD) respectively. Here, we report on both the structural characteristics and the surface images of the CNx thin films. Also, we discuss the correlation between the preparation parameters and the content of β-C3N4 phase in the CNx thin films.
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