A Study On The Preparation of YBCO Textured Thin Films On Polycrystalline Silver Substrates

In This paper,the plating of high temperature superconductive thin films is studied. The superconductive thin films are plated through magnetron sputtering with a plane YBCO Sintering target and treated in-situ annealed on polycrystalline silver substrates.The effects of deposit temperature, vacuum degree and the ratio of argon to oxygen on stracture and property of films are stulied. The textured thin films of YBCO superconductor are obtained under the following condition:substrate temperature 700℃,vacuum 18Pa,the ratio of Ar to O2 is 1:1.