A Large Range General Profilometer

A general profilometer is studied in order to solve the difficult problem for a traditional profilometer to attain high precision in a large measuring range.The instrument adopts a 2D displacement sensor and a platform based on vertical scanning.According to the zero offset,the piezoelectric actuator and the servo motor drive the vertical scanning platform to move vertically to ensure that the lever return to balance position at every sample interval.So the non-linear error caused by the rotation of the lever is very small even if the measuring range is large.According to the theoretical and experimental analysis,the instrument can measure roughness,profile size of sphere,step,groove and other surfaces with curvature precisely.