The Study On Mechanics of PCVD TiN Nucleation and Growth

TEM observations were performed on the doublelayer films of TiN deposited on to the steel substrates. X-ray diffraction on the thicker TiN films was used to study crystal structure of TiN film.
The result is that fine eqiaxed TiN grains are ranolomly oriented on the various phases including steel matrix and metal carbides such as M₆C for HSS, M₆C and M₇C₃ for steel during the initial growth. The crystal structure of TiN film shows uniaxial texture of preferned ori-entation200. The model of nucleation and growth of TiN crystal film deposited by PCVD method is thus set up.