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FENG Zhen-jian, YU Chun-na, CHEN Guang-hua. Optical Band Gap of Cubic Boron Nitride (c-BN) Thin Films[J]. Journal of Beijing University of Technology, 2003, 29(3): 381-384.
Citation: FENG Zhen-jian, YU Chun-na, CHEN Guang-hua. Optical Band Gap of Cubic Boron Nitride (c-BN) Thin Films[J]. Journal of Beijing University of Technology, 2003, 29(3): 381-384.
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Optical Band Gap of Cubic Boron Nitride (c-BN) Thin Films

  • Key Function Materials Laboratory of China Education Ministry, Beijing University of Technology, Beijing 100022, China

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  • Received Date: December 11, 2002
  • Available Online: November 10, 2022
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  • The boron nitride thin films with different cubic phase content were deposited on n-type Si(111) and fused silica substrates by radio frequency(RF) sputtering of two-stage deposition process. The films were characterized by Fourier transform infrared (FTIR) spectroscopy. The transmittance Te(λ) and reflectance Re(λ) were obtained as a function of incident photo wavelengths and the thickness of films was measured by Alpha-step. The absorption coefficient was calculated from Te(λ) and Re(λ). The optical band gap(Eg) of the films was determined by effective medium form of formula containing Eg. The results indicated that the Eg increases with the increase of the content of c-BN. The Eg is almost equal to calculated results obtained from the empirical formula.
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