3-PUU Parallel Micro-manipulating Robot System

The choices of micro-manipulaing robot mechanism and micro-actuator, micro-image's characters and processing methods are discussed. The authors present a set of micro-manipulating robot system and realized open-loop control of piezoelectric ceramic actuator by using a control model which combined mathematical method and experimental results. The results of micro-movement writing experiment indicate that the system realize visualization of the micro-manipulating object and the manipulating process by micro-vision system, can move along the planed trajectory in enough workspace and guarantee the resolution of the end of the micro-manipulating finger up to 0.1 μm.