Error Compensation Technology for SMART-CNC Super Precision NC Grinding Machine

In order to enhance the grinding accuracy of CNC grinding machine, the kinematics of multi-body system, neural net and FEM are used to make geometric error, thermo error and load error prediction model. Geometric error and loading error can be reduced by use precision NC instruction which generated through an inverse kinematics solve method and the thermo error can be reduced through an special mini displacement mechanism which controlled by the thermo error prediction neural net. Experiment results show that the max size error of a high density horniness alloy reduced from 0.225 μm to 0.045 μm after use the above sythetic error compensation method.