Wang Shusen, Zeng Meiyun, Wang Zhizhong, Zhang Xiaoqing. A Silicon-Based Membrane with High Permeability and its Properties[J]. Journal of Beijing University of Technology, 1997, 23(3): 99-104.
Citation:
Wang Shusen, Zeng Meiyun, Wang Zhizhong, Zhang Xiaoqing. A Silicon-Based Membrane with High Permeability and its Properties[J]. Journal of Beijing University of Technology, 1997, 23(3): 99-104.
Wang Shusen, Zeng Meiyun, Wang Zhizhong, Zhang Xiaoqing. A Silicon-Based Membrane with High Permeability and its Properties[J]. Journal of Beijing University of Technology, 1997, 23(3): 99-104.
Citation:
Wang Shusen, Zeng Meiyun, Wang Zhizhong, Zhang Xiaoqing. A Silicon-Based Membrane with High Permeability and its Properties[J]. Journal of Beijing University of Technology, 1997, 23(3): 99-104.
A Silicon-Based Membrane with High Permeability and its Properties
A new silicon-based membrane with high permeability was made by pyrolyzing a silicon resin membrane. Its permeability coefficients for H2, O2, N2 are about 102-103 Barter, separation factors for H2/N2 and O2/N2 are 11-13 and 3-4 respectively. This silicon membrane is suitable for industrial gas separation in an oxidizing environment at the temperature of below 300 ℃.
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