Review on Micro Pump for Microfluidics

In this paper, the design method, driving principle and characteristics of piezoelectric, electrostatic, electromagnetic, pneumatic, electro osmosis, surface tension, ferrofluid luid and thermal bubble micropumps were systematically summarized. The domestic and foreign representatives of several types of micro fluid driving pump systems were introduced. The structure, component size, and performance parameters were analyzed and compared. The development trend of the micro pumps was summed up and this paper provides a reference for the design of micro fluid driving.