Influence of Electron Cyclotron Resonance Plasma Etching on the Optical and Wetting Properties of Glass(Invited Paper)

In order to improve the transmittance and self-cleaning properties of solar cell cover glass. The borosilicate glass was etched by electron cyclotron resonance ( ECR ) plasma etching with metal nanoparticles mask. The glass surface after etching was observed by scanning electron microscopy ( SEM ) . The change of the transmittance of the glass after etching was measured by the UV-VIS spectrophotometer. The wetting property of the bare and etching glass was determined by the contact angle instrument. The results show the mountainous structure was formed on glass substrate after ECR plasma etching,and its average size ranges from 80 nm to 140 nm. The visible light transmittance of the glass is effectively improved. It increases from 91% to 94. 4% with the bias etching. Moreover, It enhancs the hydrophilicity on the surface of the glass. The lower contact angle (θ_c) of 7. 4° is obtained compared to the bare glass substrate (θ_c~47. 2°). The self-cleaning properties are improved.