Optimization Design of Proximity Capacitance Sensor Based on the Orthogonal Test

According to the double-plate proximity capacitance sensor with the same area and different area electrodes,the orthogonal test was proposed to optimize the design of the sensor,and the influence of the sensor parameters was analyzed,respectively. This experiment was feasible,the efficiency of experiment could be improved to 33%,and the importance of parameters affecting sensor signal intensity was effectively analyzed.Resultsshow that the parameters in order of important influence are spacingwidth ratio,length-width ratio and excitation frequency with the same area electrode and the spacing,length,width and excitation frequency with different area electrodes. Experiment results agree well with the results of numerical simulation using the COMSOL.