高级检索
    陈光华, 严辉, 王波, 宋雪梅, 张兴旺, 路永刚. β-C3N4超硬材料的汽相合成[J]. 北京工业大学学报, 1998, 24(3): 1-4,19.
    引用本文: 陈光华, 严辉, 王波, 宋雪梅, 张兴旺, 路永刚. β-C3N4超硬材料的汽相合成[J]. 北京工业大学学报, 1998, 24(3): 1-4,19.
    shu
    Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C3N4 Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.
    Citation: Chen Guanghua, Yan Hui, Wang Bo, Song Xuemei, Zhang Xingwang, Lu Yonggang. Vapor Synthesis of Superhard β-C3N4 Material[J]. Journal of Beijing University of Technology, 1998, 24(3): 1-4,19.
    shu

    β-C3N4超硬材料的汽相合成

    Vapor Synthesis of Superhard β-C3N4 Material

      摘要
    • 摘要: 分别采用热丝辅助反应溅射和等离子体增强热丝化学气相沉积的制备方法,制备出含有β-C3N4晶相的CNx薄膜.本文将重点报道CNx薄膜的结构与形貌特点,并进一步阐述制备参数与CNx薄膜中β-C3N4结晶成分的关系.

       

      Abstract: CNx adn films including β-C3N4 were successfully synthesized, by means of hot-filament assisted reactive sputtering and plasma enhanced hot-filament chemical vapor deposition (CVD) respectively. Here, we report on both the structural characteristics and the surface images of the CNx thin films. Also, we discuss the correlation between the preparation parameters and the content of β-C3N4 phase in the CNx thin films.

       

      • HTML全文
      • 参考文献(0)
      • 相关文章
      • 施引文献
    • 资源附件(0)

    /

    返回文章
    返回