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    孙灼, 翟乐恒, 徐信夫, 周美玲, 索红莉. 在多晶银基片上制备YBCO织构膜的研究[J]. 北京工业大学学报, 1996, 22(2): 72-75.
    引用本文: 孙灼, 翟乐恒, 徐信夫, 周美玲, 索红莉. 在多晶银基片上制备YBCO织构膜的研究[J]. 北京工业大学学报, 1996, 22(2): 72-75.
    shu
    Sun Suo, Zhai Leheng, Xu Xinfu, Zhou Meiling, Suo Hongli. A Study On The Preparation of YBCO Textured Thin Films On Polycrystalline Silver Substrates[J]. Journal of Beijing University of Technology, 1996, 22(2): 72-75.
    Citation: Sun Suo, Zhai Leheng, Xu Xinfu, Zhou Meiling, Suo Hongli. A Study On The Preparation of YBCO Textured Thin Films On Polycrystalline Silver Substrates[J]. Journal of Beijing University of Technology, 1996, 22(2): 72-75.
    shu

    在多晶银基片上制备YBCO织构膜的研究

    A Study On The Preparation of YBCO Textured Thin Films On Polycrystalline Silver Substrates

      摘要
    • 摘要: 采用YBCO烧结靶平面磁控溅射,原位处理工艺,在多晶银基片上进行镀制高温超导薄膜的研究.经过大量实验,研究了沉积温度、真空度、氩氧比对膜层结构、性能的影响.并在温度为700℃、真空度为18Pa、氩氧比为1:1,靶电流为1~2A的条件下,获得了具有c轴织构的YBCO超导薄膜.

       

      Abstract: In This paper,the plating of high temperature superconductive thin films is studied. The superconductive thin films are plated through magnetron sputtering with a plane YBCO Sintering target and treated in-situ annealed on polycrystalline silver substrates.The effects of deposit temperature, vacuum degree and the ratio of argon to oxygen on stracture and property of films are stulied. The textured thin films of YBCO superconductor are obtained under the following condition:substrate temperature 700℃,vacuum 18Pa,the ratio of Ar to O2 is 1:1.

       

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