Abstract: To promote the development of micro-electro-mechanical system packaging technology, design the application of polyethylene oxide (PEO) as the main material, different lithium were doped into PEO to obtain polymer solid electrolyte material for anodic bonding package. Anodic bonding requirements of the material are mainly with ionic conductivity; therefore, small-angle X-ray scattering (SAXS) and Fourier transform infrared radiation spectroscopy (FTIR) are used to analyze conductive mechanism of polymer solid electrolyte material.Resultsshow that: dissociation energy of Li ClO₄ is small; the transport number of lithium ions is more; with the increase of the content, the electrical conductivity increases.Bonding shows that PEO-Li ClO₄ and aluminum bonding interface between the transition layers is the key to bond together.