Abstract: The elastic modulus of material in micro-regions could be achieved by the non-destructive testing method at the nanoscale based on ultrasonic atomic force microscopy techniques. The vibration behavior of the micro-beam excited by ultrasonic wave was calculated numerically by the finite element method. The results calculated were compared with the resonance spectra gotten by the ultrasonic atomic force microscopy method experimentally. The simulation results coincide with the experimental results,by which the reliability of the simulation method was verified. The effects of the position of the sense tip on the resonant frequency were also described.