Abstract: This paper presents a topological layout and benchmark that enables the systematic performance comparison between V-and Z-shaped electrothermal micro-actuators. A common analytical model of both V-and Z-shaped micro-actuators operating in vacuum conditions is established and verified by finite-element analysis and experimental results. Based on the analytical model and the proposed topological layout and benchmark,the performance of V-and Z-shaped actuators is compared in terms of output displacement and force with varying structural parameters,which provides a reliable and practical guidance on the reasonabe selection, systematic design, and analysis of the V-and Z-shaped electrothermal micro-actuators.