ZnWO<sub>4</sub>单晶衬底制备ZnO薄膜的发光性能

ZnWO₄单晶衬底制备ZnO薄膜的发光性能

摘要: 以Zn(CH₃COO)₂·2H₂O为反应的前驱体,采用溶胶一凝胶法在ZnWO₄单晶衬底上制备出了具有良好光学特性的ZnO薄膜.通过理论计算和实验论证分析了ZnWO₄单晶作为制备ZnO薄膜的衬底材料的可行性.结果表明,ZnWO₄晶体的a晶面与ZnO晶体的c晶面晶格匹配很好,最佳方位晶格失配率只有0.83%,是制备ZnO薄膜的优良衬底.用波长325 nm光激发,薄膜在396 nm有较强的荧光发射.

Abstract: ZnO thin films of high optical quality are prepared on single crystal substrates by sol-gel technique, and zinc acetate is used as precursor in this process.The feasibility of ZnWO₄ crystal used as a substrate material was analyzed and proved by theory and experiment.The results of experiment show that lattice between ZnWO₄ a-plane and ZnO c-plane closely matches,while the mismatch of the optimum orientation lattice is only 0.83%,and the ZnWO₄ crystal wafers can be used as a fine substrate material for forming ZnO film.The strong fluorescence of the thin film is observed at 396nm when it is excited by 325nm wavelength light.