ELID磨削技术在硬脆材料精密超精密加工中的应用

Application of ELID Grinding Technology to Precision and Super-precision Grinding of Hard and Brittle Materials

摘要: 介绍了ELID磨削技术的基本原理,分析了ELID技术磨削硬脆材料的加工机理,并应用该技术对硬质合金、工程陶瓷和光学玻璃等典型硬脆材料实现了超精密镜面加工.磨后工件达到R_a为0.003~0.018的镜面.

Abstract: This paper introduces the basic principle of ELID grinding and analyzes the processing mechanism. The technology of ELID grinding was successfully applied to super-precision mirror surface grinding of such hard and brittle materials as hard metals, engineering caramics and optical glass. The workpieces after grinding can attain the mirror of R_a=0.003~0.018.