一种新型的全息干涉仪
A New Design of Holographic Interferometer
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摘要: 采用单频、基横模的氩离子激光器的0.488μm谱线及BP-212正性光致抗蚀剂,研制出高质量的全息平面反射光栅,空间频率为2400条/mm的光栅,其一级衍射波前象差<λ/6,紫外区的衍射效率η≈45%,已批置用于WSP-1型平面光栅摄谱仪及其它光谱仪和单色器。Abstract: A superior hologrphic flat reflection grating with 0.448μm spectral line obtained from a single frequency Ar+ laser is fabricated. Its characteristics are: Spatial frequency≈2400 条/mm-1, wave aberration of first order diffraction <λ/6, diffraction efficiency in ultraviolet domain=45%. This grating has become a necessary component of WSP-1 model flat grating spectrograph for batch process and is used in other spectrograph or monchrometer.