Three-dimensional Scanning Probe Calibration Method
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摘要: 为降低三维扫描测头中标定方法对测量系统定位精度的要求,提出了一种三维扫描测头标定方法,设计了一种最小二乘迭代算法及迭代数据筛选算法,实现了三维扫描测头高精度高效率的标定.为验证该三维扫描测头标定方法的稳定性与精度,设计若干组标定仿真实验,测试各类误差对于三维扫描测头标定结果的影响.结果表明:该三维扫描测头标定方法对于三维扫描测头标定过程中定位精度没有要求,对于测量机误差及扫描测头探测误差不敏感,三维扫描测头坐标系单位向量精度达0.000 01,完全满足三维扫描测头标定要求.Abstract: This paper proposes a three-dimensional scanning probe calibration method to reduce the positioning accuracy requirements.A fast least squares iterative algorithm and an iterative data filtering algorithm are designed to achieve the highly precise and efficient calibration of the three-dimensional scanning probe.Several calibration simulation experiments are designed to verify its stability and accuracy,and the influences on calibration result from various errors are tested.Experimental results show that this three-dimensional scanning probe calibration method does not require the positioning accuracy of measuring machine,it is insensitive to the measuring machine error and scanning probe detection error,the accuracy of unit vector of coordinate system of three-dimentional scanning probe reaches 0.000 01,and the three-dimensional scanning probe calibration requirements are completely satisfied.
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Keywords:
- scanning probe /
- calibrattion /
- positioning accuracy /
- data filtering
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