In-situ Micromanipulation and Dynamic Observation of Nano-sized Materials by Using a Scanning Electron Microscope
-
摘要: 介绍了配置在扫描电镜(SEM)中的微操纵仪(MMS)的操作原理、性能及应用.MMS在水平转动(X轴),上下转动(Y轴)和线性进退(Z轴)的移动精度分别达到5,3.5,0.25nm.利用具有纳米精度的移动和定位的MMS,对BiVO4晶体、硅藻土、蛋白石和ZnO纳米线等纳米材料进行了原位操纵和动态观察.该装置可操纵质量为纳克级,尺寸为几百纳米至几微米的样品.SEM-MMS系统为原位分析纳米材料提供了一种崭新的手段.Abstract: The operating principle,the performance and the application of a micromanipulator system(MMS) setup in a scanning electron microscope(SEM)is introduced in this paper.The movement precision of the MMS in clock-unclockwise rotation(X-axis),up-down rotation(Y-axis),and retreat-forward linearity(Z- axis)is 5,3.5 and 0.25 nm,respectively.The MMS with nano-precision in the movement and the position was used to in-situ manipulate and dynamically observe nano-sized materials,including BiVO4 crystals, diatomites,opals and ZnO nanowires.The setup can manipulate the samples,which possess the quality within nano kilogram and the size from several hundred nanometers to several micrometers.The SEM-MMS system is a novel means for in-situ analysis of nano-sized materials.
-
Keywords:
- micromanipulator /
- scanning electron microscope(SEM) /
- opal /
- nanowire
-
-
[1] THIEL B L,TOTH M,GRAVEN J P.Charging processes in low vacuum scanning electron microscopy[J].Microscopy and Microanalysis,2004(10):711-720.
[2] 侯碧辉,孙桂芳,吉元,等.电镜分析399生长剂对香椿等的叶表影响[J].北京工业大学学报,2007,33(1):87-90.HOU Bi-hui,SUN Gui-fang,JI Yuan,et al.ESEM observation on leaves of Chinese toon tree by using 399 growth hormone [J].Journal of University of Technology,2007,33(1):87-90.(in Chinese) [3] 唐安平.钒酸铋颜料的开发进展[J].有色金属,2005,57(4):43-46.TANG An-ping.Development of bismuth vanadate yellow pigments[J].Nonferrous Metals,2005,57(4):43-46.(in Chinese) [4] 王利剑,郑水林,舒锋.硅藻土负载二氧化钛复合材料的制备与光催化性能[J].硅酸盐学报,2006,34(7):823-826.WANG Li-jian,ZHENG Shui-lin,SHU Feng.Preparation and photocatalytic activity of titania/diatomite composite[J]. Journal of the Chinese Ceramic Society,2006,34(7):823-826.(in Chinese) [5] 谭春华,范广涵,梁桂琼,等.人工蛋白石光子晶体制备技术及改性研究进展[J].激光与光电子学进展,2005,42 (6):12-18.TAN Chun-hua,FAN Guang-han,LIANG Gui-qiong,et al.Progress in formation and modification of artificial opal based on colloid silica spheres[J]. Laser & Optronics Progress,2005,42(6):12-18.(in Chinese) [6] JONSSON F,CLIVIA M,SOTOMAROR TORRES C,et al.Artificially inscribed defects in opal photonic crystals[J]. Microelectronic Engineering,2005(78):429-435.
[7] 张黎,陈尔凡.一维ZnO纳米材料的制备技术与应用[J].当代化工,2007,36(4):412-416.ZHANG Li,CHEN Er-fan.Preparation and application of 1-D ZnO nano-materials[J].Contemporary Chemical Industry, 2007,36(4):412-416.(in Chinese) [8] 王中林.氧化物纳米结构的科学技术[J].纳米科技,2006,3(6):5-12.WANG Zhong-lin.Science and technology of oxide nanostructures[J].Nanotechnology,2006,3(6):5-12.(in Chinese)
计量
- 文章访问数: 12
- HTML全文浏览量: 0
- PDF下载量: 7