β-C3N4超硬材料的汽相合成
Vapor Synthesis of Superhard β-C3N4 Material
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摘要: 分别采用热丝辅助反应溅射和等离子体增强热丝化学气相沉积的制备方法,制备出含有β-C3N4晶相的CNx薄膜.本文将重点报道CNx薄膜的结构与形貌特点,并进一步阐述制备参数与CNx薄膜中β-C3N4结晶成分的关系.Abstract: CNx adn films including β-C3N4 were successfully synthesized, by means of hot-filament assisted reactive sputtering and plasma enhanced hot-filament chemical vapor deposition (CVD) respectively. Here, we report on both the structural characteristics and the surface images of the CNx thin films. Also, we discuss the correlation between the preparation parameters and the content of β-C3N4 phase in the CNx thin films.
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