Charging Compensation of Oxides by Oxygen Environmental Scanning Electron Microscope
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摘要: 在(5×10-3)~(2×10-2) Pa的氧环境扫描电镜(SEM)中观察到由入射电子束辐照引起的Al2O3、SiO_2等氧化物荷电现象得以减轻。氧化物受激氧解吸,使样品表面的氧空位成为荷电势阱而产生荷电。通过氧气氛中提供的氧离子对表面缺陷的修复作用,使氧化物的荷电现象得到补偿。氧环境扫描电子显微分析方法是针对氧化物类绝缘材料荷电的一种简便的、自动调节的荷电补偿方法。Al2O3的俄歇电子能谱证明,在6×10-6Pa的氧压下可以完全消除Al2O3的表面荷电。Abstract: Charging phenomena of oxides (such as Al2O3 and SiO2, etc.) caused by the irradiation of incident electron beam have been reduced in an oxygen environmental scanning electron microscope (SEM) at the O2 pressure of 5×10-3 Pa to 2×10-2Pa. The desorption of stimulated oxygen in oxides makes the oxygen vacancies on the surface of sample become the charging potential trip so as to produce charging phenomenon. The charging phenomena on oxides have been compensated by repairing surface defects by the oxygen ions produced in the oxygen atmosphere. The oxygen environmental scanning electron microscopy is a simple and automatic regulated charging compensation method on insulating oxide materials. Al2O3 spectra of Auger electron spectroscope (AES) prove that the surface charging of the Al2O3 can be completely eliminated under the O2 pressure of 6×10-6Pa.
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Keywords:
- oxygen environment /
- SEM /
- oxide /
- charging compensation
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