Abstract: A device,that can not only clamp the flexible gripping and positioning of semi-cylindrical cavity to realize the automatic assembly of micro-target,but also ensure the precision of the assembly,is presented in this paper.The flexible clamping element,which is made of rubber and used to clamp the semi-cylindrical cavity that is 800-1 000 μm in diameter and 25-75 μm in thickness,is the key of the above device.The rationality of the designed flexible clamping element structure was analyzed and validated by the finite element software ANSYS.Through repeated revisions,as well as analysis and simulation to verify,a suitable clamping element structure was finally received.The designed structure of clamping element can not only meet the mostly requirements of the micro-target assembly,but also clamp other micro and thin columniform objects.