全息法制作光谱学衍射光栅
The Fabrication of Diffraction Grating for Spectroscopy by Holographic Method
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摘要: 用全息法在光致抗蚀剂涂层上制作光栅,涉及到所用的激光光源、干涉仪系统和光敏记录介质。在现有条件下,对一个刻划面积约80×40mm2的光栅,可以得到波前象差(1)/(6)λ,30%的衍射效率,分辨率为理论值的75%和无鬼线强度。Abstract: making diffraction grating on photoresist agent by holographic method consists of laser source, interference system end photosensitive recording media.under our realizable conditions, we Can obtain a grating with an areaof about 80×40mm2,(λ)/(6) wavefront aberration, 30% diffoaction efficiency,75% of the theorectical limit of resoloing power and no ghost line.