半导体器件的两维数值分析

    Two Dimension Numerical Analysis of Semiconductor Devices

    • 摘要: 本文给出了一个新的半导体器件两维数值分析程序SDA—1,该程序可对双极晶体管及MOS场效应晶体管进行有限元法两维数值分析。程序采用了符号LU分解的稀疏矩阵技术、有限元网格的自适应细分技术及改进的非线性迭代技术,使得器件分析的速度显著提高。

       

      Abstract: A new two dimensional numerical analysis program SDA-1 is presented for semiconductor devices.It is applicable to two dimensional finite element numerical analysis of bipolar transistors and MOSFET. The adoptation of sparse matrix technique for Symbol LU decomposition, self-adaptive refinement technique for finite element meshes, and modified non-linear iterative technique, speeds up the device analysis cons-iderably.

       

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