同步辐射光监测系统
Monitor System of Synchrotron Radiation Light
-
摘要: 北京正负电子对撞机的3B1束线是一条专用光刻束线,光源的性能将影响光刻的质量,必须用特殊的探测方法对光源特性进行监测,为此建立了一套同步辐射光的实时监测系统。Abstract: The 3B1 beam line is a dedicated photoetching line for the Beijing Electron Positron Collider (BEPC). The performance of synchrotron radiation light sources will influence photoetching quality. It is necessary to monitor the performance of synchrotron radiation source with a different detecting methods. For this reason, a monitored control system of synchrotron radiation light was established.
下载: