Abstract: The two-dimension and three-dimension thin film growths were simulated using Monte Carlo method. To describe the interaction between particles, Morse potential is introduced and the influences of neighboring particles are carefully considered according to a. It is the significant discovery in our experiment that the percentage of the number of particles about a certain cluster size is linear with the cluster size and the relationship of which is dimidiate angle at some stage in two-dimensional growth simulation. The results of three-dimensional simulation indicate that the percentage of cluster particles, with monomers being not included, decreases with increase of the number of adatoms, which is in agreement with the results of two-dimensional simulation.