基于激光微技术的光谱检测“集成缩微”的研究

Research for 'Function Integration and Structure Micromation' of Spectrum Detection in μTAS Field Based on Laser Micro-technology

摘要: 为了满足μ-TAS领域对光谱微检测提出的“功能集成与结构缩微”的技术要求,利用激光微技术获得了光谱微检测技术的核心部件,即百微米级微光波导管,并对光谱微检测在μ-TAS生化芯片中的应用方案进行了研究.结果表明,利用激光微加工技术将微检测系统集成到微型全分析系统生化芯片中具有非常广阔的应用前景.

Abstract: Spectrum micro-detection technology is one of the key technologies of miniaturized total analysis system(μTAS) biology-chemistry chip.To meet the need of μTAS in Spectrum micro-detection technology on "function integration and structure micromation",based on laser micro-technology,the micro light waveguide pipe hundreds of microns,one of the key parts of Spectrum micro-detection technology,was fabricated.Besides,the application of Spectrum micro-detection technology in μTAS was studied.