大直径单晶硅垂直磁场下的数值模拟
Numerical Simulation of Large Diameter Czochralski Crystal Silicon With a Vertical Magnetic Field
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摘要: 为了研究磁场对晶体生长界面的形状、温度、氧的质量分数分布等的影响,本文采用低雷诺数的κ-ε湍流模型,对直径为200mm、哈特曼数分别为0、500、1000和2000的大直径单晶硅进行了数值模拟。结果表明,垂直磁场能抑制熔体中的径向对流,并在一定程度上使子午面的流动减弱,氧的轴向减小,等温线变得更为平坦。当磁场强度过高时,熔体中氧的轴向增加,湍流程度也增加。Abstract: It is known that the shape of the growth interface, the temperature, oxygen concentration distribution are sensitive to the magnetic field strength. In this paper, a low Reynolds number model was used for the simulation of a 200 mm large diameter silicon crystal growth under a vertical magnetic field with different strength, the Hartmann number is equal to 0, 500, 1000 and 2000 respectively. Numerical results showed that a vertical magnetic field can effectively reduce the strength of the flow at the radial orientation; and can reduce the flow at the meridian plane; the oxygen concentration is also decreased at the axial orientation. The isotherm becomes flat. However, when the vertical magnetic field strength is too higher, the oxygen concentration at the axial orientation and the turbulence intensity increased.