铌酸锂表面波器件基底最佳切割方向

    Optimum Cut Direction of Lithium Niobate as Substrate in Surface Acoustic Wave Devices

    • 摘要: 为在表面波器件设计时选择基底的最佳切割方向,推导表面波压电增劲晶体声学基本方程和表面波边界条件方程,使用循环迭代法,对铌酸锂晶体最佳退耦的声弧矢yz平面计算了沿不同方向的电自由条件表面波声速与电短路条件表面波声速.在此基础上计算了机电耦合系数,并确定最大机电耦合系数的方向为基底的最佳切割方向.计算结果表明,铌酸锂晶体作为表面波器件基底的最佳切割方向为164°y切.

       

      Abstract: In order to select optimum cut direction of the Lithium Niobate(LN) substrate in designing of the SAW devices,SAW piezoelectric strengthening crystal acoustics basic equations and SAW boundary condition equations are deduced.In optimum decoupling acoustic sagittal yz plane of the LN crystals,using circle iterative method,SAW velocities under electric free conditions and SAW velocities under electric short circuit are calculated in different directions systematically.Electro-mechanical coupling coefficients are calculated.Direction of the biggest electro-mechanical coupling coefficient is the optimum cut direction of the substrate.The calculation result indicates that optimum cut direction of LN crystals as substrates in SAW devices is 164° y-cut.

       

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