Abstract: To deal with the problem of large system error of the micro-tensile stage and improve its measurement accuracy,several data processing methods are studied in this paper.Through the design of high speed and high accuracy data acquisition system,comparing the linear regression,polynomial fitting,subsection fitting and point-by-point comparison methods,the author can get the advantages and disadvantages of these methods in system error correction.All data processing methods can be realized by VC+ + programming and also can be dealt on line.Experimental results show that flexible use of these methods can effectively improve the measurement accuracy for the micro-tensile stage.