Abstract: The sub-micron sized Sc₂O₃ doped tungsten powders with the particle size distributed from 500 to 1 100 nm have been fabricated by Sol-Gel methods combined with two-step hydrogen reduction process.The W-Sc₂O₃ targets have been sintered via spark plasma sintering (SPS) using the obtained sub-micron sized powders pre-treated under different conditions.The comparative density, rockwell hardness, and surface morphology have been studied in this paper.Resultsindicate that the W-Sc₂O₃ targets have been successfully sintered at 1 300 ℃ with the sub-micron sized powders, whose sintering temperature is much lower than that of using micrometer sized powders.The sintered W-Sc₂O₃ targets with uniformly distribution of Sc have a highly comparative density of 96.4% and rockwell hardness of 86.4 HRC.