Abstract: Coordinate metrology technology is an important symbol of advanced manufacturing and measurement level.It is helpful to fully understand the coordinate metrology technology by the overview of its evolvement history,current status and trends.The milestone events of coordinate metrology development are reviewed.The current status,including the measurement range and accuracy,probing technologies,control systems,software and tracing technologies are analyzed.The development trends,such as the open,flexible and compatibly control technologies for the inproduction measurement,multi-sensor information fusion technologies,intelligent coordinate metrology and remote calibration technologies are predicted.