Abstract: Separation of data and applications is helpful for fast reconstruction and data sharing.Facing to equipment operation and control in virtual manufacturing systems,a specification approach is proposed based on formalized specification language Z.The point is to specify control-related factors,such as equipment geometry and control process.A modeling method based on the control process meta-model is proposed.The control-move-node is regard as the core element,which relates the driving parts,driven parts,movement mode,and relevant data.The logic node ensures the parallel process.A stereo garage modeling example is provided to demonstrate the feasibility of the meta-model.The Z specification formalized description of the system ensures data precise semantics.