空气静压主轴宏微尺度研究进展综述

    Review on Progress of Macro and Micro Scale Research of Aerostatic Spindles

    • 摘要: 空气静压主轴作为精密超精密机床的关键部件,其回转精度高,运转平稳,振动及噪声较传统轴承小,高速回转时的温升较小. 但其存在刚度和承载力较差的问题. 因而,有必要对现有的空气静压主轴重要研究成果进行系统的总结及分析. 回顾空气静压主轴的历史发展及研究成果,空气静压主轴的主要研究目的在于提高其承载力和刚度,改善动/静压特性以及稳定性等,并通过改进雷诺方程以及优化结构参数进行实现. 同时其微尺度特性也成为研究的热点,研究结果表明,微尺度特性对于主轴的承载力以及刚度等具有重要影响. 该研究从空气静压主轴的发展历程、静/动力学性能以及微尺度领域的黏度、速度滑移和稀薄效应等对空气静压主轴性能产生重要影响的因素进行综述和分析. 结合现有的数值模拟方法,对主轴回转精度的测量和主轴运动状态进行了分析. 最后,对空气静压主轴的研究发展趋势进行了预测.

       

      Abstract: As the key component of precision ultra-precision machine tools, the aerostatic spindle is characterized by high rotary accuracy, smooth operation, less vibration and noise than conventional bearings, and less temperature rise at high-speed rotation. However, it has poor stiffness and load-bearing capacity. Therefore, it is necessary to systematically summarize and analyze the existing important research results of aerostatic spindles. Reviewing the historical development and research results of aerostatic spindles, the primary research aims to improve the load capacity and stiffness, dynamic/static characteristics and stability of aerostatic spindles by improving the Reynolds equation and optimizing the structural parameters. At the same time, the microscale characteristics have also become a research hotspot, and the research results show that the microscale characteristics influence the load carrying capacity and stiffness of the spindle. The development history of aerostatic spindles, static/dynamic performance, and the factors that significantly affected the performance of aerostatic spindles, such as viscosity, velocity slip, and thinning effects in the microscale field was reviewed in this paper. Combined with existing numerical simulation methods, the measurement of spindle rotation accuracy and the state of spindle motion were analyzed. Finally, the research development trend of aerostatic spindles was forecasted.

       

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