二维光电器件材料掺杂方法及影响

    Doping Methods and Their Influences on Two-dimensional Photoelectric Device Materials

    • 摘要: 二维半导体材料如石墨烯、黑磷、过渡族金属硫化物, 因其尺寸小、易集成、光电性能优良等优点, 是现阶段微型化光电器件的良好沟道材料. 但材料存在不利于实际应用的一些缺点, 如石墨烯的“零带隙”、黑磷的易降解、过渡族金属硫化物本征迁移率低. 加之在器件制作过程中需要调节势垒高度, 因此通过掺杂来对二维半导体材料进行调节极为必要. 掺杂是通过引入杂质原子, 达到调节半导体材料的载流子类型和浓度、带隙、稳定性等目的. 对二维光电器件材料的主要掺杂方法、掺杂对材料微观结构和性能产生的影响进行了综述, 根据掺杂原子的占位情况分为位于原材料晶格中和表面两大类进行讨论. 在两大类中, 介绍了多种掺杂方法, 包括气相输运法、离子注入法、表面沉积法和化学旋涂法, 并讨论了每种方法的优点和局限性.

       

      Abstract: Because of their small size, easy integration and excellent photoelectric properties, two-dimensional semiconductor materials, such as graphene, black phosphorus, and transition metal dichalcogenides, are good channel materials for miniaturized photoelectric devices. However, there are limitations in the application of two-dimensional semiconductor materials that remain to be resolved. These challenges include the "zero band gap" of graphene, the degradation of black phosphorus in water or oxygen, and the low intrinsic mobility of TMDCs. Additionally, barrier height needs to be adjusted in the process of device production. Hence, it is necessary to implement doping methods to adjust the two-dimensional semiconductor materials. By introducing impurity atoms, doping can influence carrier type, carrier concentration, band gap and stability of semiconductor materials. This paper reviewed recent researches on doping methods of two-dimensional photoelectric device materials, and how doping influences material structure and material performance. For the purpose of clarity, the methods were separated into two main categories based on location of the doped impurity atoms, either in the crystal lattice or on the material surface. Under each category, various doping methods were then introduced, including the vapor-phase transport method, the ion implantation method, the surface deposition method, and the chemical spin/drops method, and then the advantages and limitations of each method were discussed.

       

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