PMMA对石墨烯转移质量的影响

    Effect of PMMA on the Transfer Quality of Graphene

    • 摘要: 在聚甲基丙烯酸甲酯(polymethyl methacrylate,PMMA)辅助法转移化学气相沉积法生长的石墨烯过程中,PMMA是一种不可或缺的保护材料,为了分析探讨PMMA的固化条件对石墨烯转移质量的影响,借助拉曼光谱仪、原子力显微镜、紫外可见分光光度计、霍尔效应测试仪等测试设备,对不同PMMA固化条件下转移所获得的石墨烯的表面形貌以及光电特性进行系统化的测试分析.结果表明:PMMA的固化对石墨烯的转移质量有着重要的影响,它能够有效地支撑和保护石墨烯,使石墨烯在转移过程中减少褶皱破损、杂质吸附以及晶格结构缺陷,并获得最佳的PMMA固化温度和时间分别为180℃、120 s,对应的石墨烯最高平均光学透过率、载流子浓度及迁移率分别达90.6%、6.7×1012 cm-2、1 500 cm2/(V·s).

       

      Abstract: Polymethyl methacrylate (PMMA) is an indispensable important protective material in thetransfer process of graphene by PMMA assisted method. In order to analyze the effect of PMMA on the transfer quality of graphene, the surface morphology and photoelectric properties of graphene were systematically analyzed by Raman spectrometer, atomic force microscope (AFM), UV-Vis spectrophotometer, and Hall effect measurement system. Results show that the curing of PMMA plays an important role in the transfer quality of graphene, since fully cured PMMA can effectively support and protect graphene in order to reduce gravel damage, impurity adsorption and structural defects during the transfer process. In addition, the optimum curing temperature and time of PMMA solution were 180℃ and 120 s, respectively. The corresponding optical transmittance, carrier concentration and mobility of graphene achieved 90%, 6.7×1012 cm-2, 1 500 cm2/(V·s), respectively.

       

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