Abstract: The use of high-power high-frequency excitation source is a good solution to improve the electromagnetic acoustic transducer conversion efficiency. A design method of Class-DE RF power amplifier topology and its circuit parameters was established by a proposed Class-DE RF power inverter technology. With the Class-DE power amplifier circuit simulation analysis, a TMS320F2812 digital signal processor was used as the main controller and temperature sensor, current sensor and voltage sensor were also adopted to make the system work in a controlled environment. UCC27531 was selected as the MOSFET driver chip, IRFP460 was utilized as the switching devices, and the high speed power MOSFET driver was obtained. Experiment show that the source works in a very stable condition. The source has a maximum output power of 1.1kW, a peak voltage of 270V, a load current of 26A, and a maximum output frequency of 1MHz, which can meet the work requirements of electromagnetic ultrasonic transducer. It lays a foundation for further research and development of the electromagnetic ultrasonic excitation source with higher frequency and higher power.