内嵌式微球透镜的光纤飞秒激光加工技术及应用

    Fabrication and Application of Embedded Microball Lens Fabricated With Femtosecond Fiber Laser

    • 摘要: 利用聚焦的高重复频率飞秒脉冲在聚甲基丙烯酸甲酯薄片内部制作了具有优良光学性能的微球凸透镜及微球凹透镜.微球凸透镜的加工原理是基于飞秒激光诱致折射率变化机制,而微球凹透镜的制作是基于多光子效应及高重频激光脉冲序列的热积累效应.以微球凹透镜为例,对比了不同聚焦条件下制作微球透镜的加工效率及效果,讨论了选择聚焦透镜所需综合考虑的因素.提出了采用本方法可针对特定的应用需求设计并精确制作微光学系统.最后,讨论了内嵌式微透镜在微流控器件中增强荧光信号收集能力与成像能力的潜在应用价值,以及单步制作功能集成的微流控芯片的可能性.

       

      Abstract: Two types of embedded microball lenses namely convex microball lens ( VMBL) and concave microball lens ( CMBL ) with outstanding optical properties were successfully fabricated inside a polymethethyl methacrylate ( PMMA) substrate by utilizing a high repetition rate femtosecond fiber laser. The fabricating mechanism of the VMBL was refractive index change induced by femtosecond laser, and the CMBL was fabricated due to the multiphoton absorption and the heat accumulation effect of the successive laser pulses irradiation at a high repetition rate. As an example, the CMBL fabrication efficiency with 20 × and 50 × microscopic objectives was compared. The principles for choosing a proper objective when fabricating customized embedded lens were also discussed. Additionally, these lenses can be used as powerful tools in constructing specific micro-optic systems towards various applications. This technology also allows the direct fabrication of microlens inside microfluidic devices to enhance the ability of gathering fluorescence signals and optical imaging. It is very possible to fabricate a function-integrated microfluidic chip in one-step by utilizing this technology in the near future.

       

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